VML190
無鐵芯直線電機直驅
高質量長壽命機械導軌
側面密封
低成本高性能
多規(guī)格多行程選擇
應用：工業(yè)或科研，如計量、平板顯示器制造等。
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Mechanical Specifications |
190-100 |
190-150 |
190-200 |
190-250 |
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Travel |
100 mm |
150 mm |
200 mm |
250 mm |
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Calibrated Accuracy |
±1 μm |
±1 μm |
±1 μm |
±1 μm |
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Resolution |
1 nm – 10 nm |
1 nm – 10 nm |
1 nm – 10 nm |
1 nm – 10 nm |
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Repeatability (Bi-Directional) |
±0.4 μm |
±0.4 μm |
±0.4 μm |
±0.4 μm |
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Straightness & Flatness |
±1.5 μm |
±2 μm |
±2.5 μm |
±3 μm |
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Pitch & Yaw |
6 arc sec |
7 arc sec |
8.5 arc sec |
9.5 arc sec |
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Maximum Speed |
2 m/s |
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Maximum Acceleration |
3 g |
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Maximum Force (Continuous) |
100 N |
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Load Capacity |
Horizontal |
60 kg |
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Side |
60 kg |
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Moving Mass |
4.5 kg |
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Stage Mass |
14.5 kg |
16 kg |
17 kg |
18 kg |
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Material |
Aluminum |
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MTBF |
20,000 hrs |
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Mechanical Specifications |
190-300 |
190-400 |
190-500 |
190-600 |
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Travel |
300 mm |
400 mm |
500 mm |
600 mm |
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|
Calibrated Accuracy |
±1 μm |
±1 μm |
±1 μm |
±1 μm |
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|
Resolution |
1 nm – 10 nm |
1 nm – 10 nm |
1 nm – 10 nm |
1 nm – 10 nm |
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|
Repeatability (Bi-Directional) |
±0.5 μm |
±0.5 μm |
±0.5 μm |
±0.5 μm |
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Straightness & Flatness |
±4 μm |
±5 μm |
±6 μm |
±6.5 μm |
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Pitch & Yaw |
11 arc sec |
12.5 arc sec |
15 arc sec |
17 arc sec |
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Maximum Speed |
2 m/s |
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Maximum Acceleration |
30 m/s2 |
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Maximum Force (Continuous) |
100 N |
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Load Capacity |
Horizontal |
60 kg |
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Side |
60 kg |
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Moving Mass |
4.5 kg |
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Stage Mass |
20 kg |
22 kg |
25 kg |
27 kg |
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Material |
Aluminum |
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MTBF |
20,000 hrs |
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Mechanical Specifications |
190-800 |
190-1000 |
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Travel |
800 mm |
1000 mm |
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Calibrated Accuracy |
±1.5 μm |
±1.5 μm |
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Resolution |
1 nm – 10 nm |
1 nm – 10 nm |
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|
Repeatability (Bi-Directional) |
±0.5 μm |
±0.5 μm |
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Straightness & Flatness |
±8 μm |
±10 μm |
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Pitch & Yaw |
19 arc sec |
22.5 arc sec |
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Maximum Speed |
2 m/s |
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Maximum Acceleration |
30 m/s2 |
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Maximum Force (Continuous) |
100 N |
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Load Capacity |
Horizontal |
60 kg |
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Side |
60 kg |
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Moving Mass |
4.5 kg |
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Stage Mass |
32 kg |
36 kg |
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Material |
Aluminum |
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MTBF |
20,000 hrs |
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