VML255
無鐵芯直線電機直驅(qū)
高質(zhì)量長壽命機械導(dǎo)軌
側(cè)面密封
低成本高性能
多規(guī)格多行程選擇
應(yīng)用：工業(yè)或科研，如計量、平板顯示器制造等。
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Mechanical Specifications |
225-100 |
225-150 |
225-200 |
225-250 |
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Travel |
100 mm |
150 mm |
200 mm |
250 mm |
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Calibrated Accuracy |
±1 μm |
±1 μm |
±1 μm |
±1 μm |
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Resolution |
1 nm – 100 nm |
1 nm – 100 nm |
1 nm – 100 nm |
1 nm – 100 nm |
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Repeatability (Bi-Directional) |
±0.4 um |
±0.4 um |
±0.4 um |
±0.4 um |
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Straightness & Flatness |
±1.5 μm |
±2 μm |
±2.5 μm |
±3 μm |
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Pitch & Yaw |
5.5 arc sec |
6 arc sec |
8 arc sec |
9 arc sec |
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Maximum Speed |
2 m/s |
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Maximum Acceleration |
30 m/s2 |
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Maximum Force (Continuous) |
150 N |
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Load Capacity |
Horizontal |
100 kg |
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Side |
100 kg |
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Moving Mass |
8 kg |
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Stage Mass |
24 kg |
25.5 kg |
27 kg |
28.5 kg |
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Material |
Aluminum |
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MTBF |
20,000 hrs |
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Mechanical Specifications |
225-300 |
225-400 |
225-500 |
225- 600 |
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Travel |
300 mm |
400 mm |
500 mm |
600 mm |
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|
Calibrated Accuracy |
±1 μm |
±1 μm |
±1 μm |
±1 μm |
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|
Resolution |
1 nm – 100 nm |
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|
Repeatability (Bi-Directional) |
±0.4 um |
±0.4 um |
±0.4 um |
±0.4 um |
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Straightness & Flatness |
±3.5 μm |
±4.5 μm |
±5.5 μm |
±6.5 μm |
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Pitch & Yaw |
11 arc sec |
13 arc sec |
15 arc sec |
16.5 arc sec |
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Maximum Speed |
2 m/s |
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Maximum Acceleration |
30 m/s2 |
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Maximum Force (Continuous) |
150 N |
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Load Capacity |
Horizontal |
100 kg |
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Side |
100 kg |
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Moving Mass |
8 kg |
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Stage Mass |
30 kg |
33 kg |
36 kg |
39 kg |
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Material |
Aluminum |
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MTBF |
20,000 hrs |
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Mechanical Specifications |
225-800 |
225-1000 |
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|
Travel |
800 mm |
1000 mm |
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Calibrated Accuracy |
±1.5 μm |
±1.5 μm |
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|
Resolution |
1 nm – 10 nm |
1 nm – 10 nm |
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|
Repeatability (Bi-Directional) |
±0.5 μm |
±0.5 μm |
|
|
Straightness & Flatness |
±8.5 μm |
±10 μm |
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|
Pitch & Yaw |
19 arc sec |
23 arc sec |
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|
Maximum Speed |
2 m/s |
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Maximum Acceleration |
30 m/s2 |
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Maximum Force (Continuous) |
150 N |
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Load Capacity |
Horizontal |
100 kg |
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Side |
100 kg |
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Moving Mass |
8 kg |
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Stage Mass |
46 kg |
52 kg |
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Material |
Aluminum |
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MTBF |
20,000 hrs |
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