VML560LM
無鐵芯直線電機(jī)直驅(qū)
高質(zhì)量長壽命機(jī)械導(dǎo)軌
側(cè)面密封
低成本高性能
多規(guī)格多行程選擇
應(yīng)用：工業(yè)或科研，如計量、平板顯示器制造等。
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Mechanical Specifications |
560-300 |
560-400 |
560-500 |
560-600 |
560-800 |
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Travel |
300 mm |
400 mm |
500 mm |
600 mm |
800 mm |
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Calibrated Accuracy |
±1 μm |
±1 μm |
±1 μm |
±1 μm |
±1.5 μm |
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Resolution |
1 nm – 10 nm |
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Repeatability (Bi-Directional) |
±0.5 μm |
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Straightness & Flatness |
±3 μm |
±4 μm |
±5 μm |
±6 μm |
±8 μm |
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Pitch & Yaw |
10 arc sec |
13 arc sec |
15 arc sec |
16.5 arc sec |
19 arc sec |
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Maximum Speed |
2 m/s |
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Maximum Acceleration |
30 m/s2 |
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Maximum Force (Continuous) |
500 N |
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Load Capacity |
Horizontal |
150 kg |
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Side |
150 kg |
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Moving Mass |
25 kg |
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Stage Mass |
90 kg |
100 kg |
110 kg |
120 kg |
140 kg |
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Material |
Aluminum |
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MTBF |
20,000 hrs |
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