VXT130-L Series
具有納米級性能并且行程較長
高分辨率（1nm），高重復(fù)定位精度（75nm）和高定位精度（250nm）
運(yùn)動(dòng)誤差小、穩(wěn)定精度高
具有抗蠕變特性
高動(dòng)態(tài)特性
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Mechanical Specifications |
VXT130-060-N |
VXT130-060-P |
VXT130-110-N |
VXT130-110-P |
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Travel |
60 mm |
60 mm |
110 mm |
110 mm |
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Accuracy |
±2 μm |
±250 nm |
±3 μm |
±300 nm |
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Resolution |
1 nm |
1 nm |
1 nm |
1 nm |
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Repeatability (Bi-Directional) |
±100 nm |
±75 nm |
±100 μm |
±75 nm |
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Straightness & Flatness |
±0.75 μm |
±0.75 μm |
±0.75 μm |
±0.75 μm |
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Pitch |
10 arc sec |
10 arc sec |
10 arc sec |
10 arc sec |
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Yaw |
5 arc sec |
5 arc sec |
5 arc sec |
5 arc sec |
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Maximum Speed |
300 mm/s |
300 mm/s |
300 mm/s |
300 mm/s |
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Maximum Acceleration (No Load) |
10 m/s2 |
10 m/s2 |
10 m/s2 |
10 m/s2 |
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In-Position Stability |
<1 nm |
<1 nm |
<1 nm |
<1 nm |
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Maximum Force (Continuous) |
22 N |
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Load Capacity |
Horizontal |
10 kg |
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Side |
10 kg |
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Moving Mass |
1.5 kg |
1.5 kg |
2.0 kg |
2.0 kg |
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Stage Mass |
2.8 kg |
2.8 kg |
3.5 kg |
3.5 kg |
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Material |
Aluminum Body |
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MTBF |
20,000 hours |
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Mechanical Specifications |
VXT130-160-N |
VXT130-160-P |
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Travel |
160 mm |
160 mm |
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Accuracy |
±4 μm |
±300 nm |
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Resolution |
1 nm |
1 nm |
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Repeatability (Bi-Directional) |
±100 nm |
±75 nm |
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Straightness & Flatness |
±1 μm |
±1 μm |
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Pitch |
10 arc sec |
10 arc sec |
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Yaw |
5 arc sec |
5 arc sec |
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Maximum Speed |
300 mm/s |
300 mm/s |
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Maximum Acceleration (No Load) |
10 m/s2 |
10 m/s2 |
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In-Position Stability |
<1 nm |
<1 nm |
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Maximum Force (Continuous) |
22 N |
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Load Capacity |
Horizontal |
10 kg |
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Side |
10 kg |
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Moving Mass |
2.5 kg |
2.5 kg |
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Stage Mass |
4.0 kg |
4.0 kg |
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Material |
Aluminum Body |
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MTBF |
20,000 hours |
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