3、集成高精度線性編碼器可實現(xiàn)較高重復性和高精度定位
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Mechanical Specifications |
VZT-I-5 |
VZT-I-10 |
VZT-I-20 |
VZT-I-30 |
|
Travel |
5 mm |
10 mm |
20 mm |
30 mm |
|
Accuracy |
±0.75 μm |
±0.75 μm |
±1 μm |
±1 μm |
|
Repeatability (Bi-Directional) |
±0.1 μm |
±0.1 μm |
±0.15 μm |
±0.2 μm |
|
Resolution(Minimum Incremental Motion) |
0.1 um |
0.1 um |
0.1 um |
0.1 um |
|
Straightness & Flatness |
±1 μm |
±1 μm |
±2 μm |
±2 μm |
|
Pitch |
10 arc sec |
10 arc sec |
15 arc sec |
20 arc sec |
|
Yaw |
10 arc sec |
10 arc sec |
15 arc sec |
20 arc sec |
|
Maximum Speed |
10 mm/s |
10 mm/s |
10 mm/s |
10 mm/s |
|
Maximum Acceleration (No Load) |
5 m/s2 |
5 m/s2 |
5 m/s2 |
5 m/s2 |
|
In-Position Stability |
<2 nm |
<2 nm |
<2 nm |
<2 nm |
|
Maximum Force (Continuous) |
80 N |
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|
Center Load Capacity |
4 kg |
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|
Stage Mass |
2.5 kg |
2.7 kg |
3.0 kg |
3.3 kg |
|
Material |
Black Aluminum Body |
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|
MTBF(Mean Time Between Failure) |
20,000 hours |
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