VAG的優(yōu)點(diǎn)：
1、掃描速度快
2、整定時(shí)間小
3、線性編碼器反饋
4、全氣浮及真空預(yù)載
|
Travel |
Scan Axis |
350 mm , 500 mm, |
|
Step Axis |
350 mm , 500 mm |
|
|
Drive System |
Linear Brushless Motor |
|
|
Resolution |
0.25 nm |
|
|
Accuracy |
±300 nm |
|
|
Repeatability（choose linear driver） |
±100 nm (±50 nm) |
|
|
XYZ Position Stability（Air On） |
20 nm |
|
|
Granite Bass Thickness |
250 mm |
|
|
Rated Payload(Maintaining Dynamic Specifications) |
5 kg |
|
|
Maximum Payload |
25 kg |
|
|
Maximum Velocity with Rated Payload |
Scan & Step Axis |
1000 mm/s |
|
Peak Acceleration with Rated Payload |
Scan & Step Axis |
2 G (20 m/s2) |
|
RMS Acceleration with Rated Load |
Scan & Step Axis |
1 G (10 m/s2) |
|
Stiffness,First Natural Frequency with Rated Payload |
>100 Hz |
|
|
Pitch |
2 arc sec |
|
|
Roll |
2 arc sec |
|
|
Yaw |
2 arc sec |
|
|
XY straightness |
1 um |
|
|
XY Flatness |
1.2 um |
|
|
XY Orthogonality |
<2 arc sec |
|
|
Velocity ripple( sampled at 400mm/s) |
0.1 % |
|
|
MTBF |
40,000 hours |
|