高動(dòng)態(tài)特性
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Basic Model |
VALI025 |
VALI050 |
VALI100 |
VALI150 |
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Total Travel |
25 mm |
50 mm |
100 mm |
150 mm |
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Motor Type |
Brushless Linear Sevomotor |
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Feedback |
Noncontact Linear Encoder |
0.5 nm - 10 nm |
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Maximum Speed |
300 mm/s |
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Maximum Acceleration（no-load） |
10 m/s2 |
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Maximum Load |
15 kg |
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Accuracy(with error compensation, temperature stabilized within 0.2°C） |
±0.2 μm |
±0.2 μm |
±0.3 μm |
±0.5 μm |
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Repeatability |
±50 nm |
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Straightness &Flatness |
±0.25 μm |
±0.4 μm |
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Pitch/Yaw |
±0.25 arc sec |
±0.5 arc sec |
±1.0 arc sec |
±1.25 arc sec |
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Minimum incremental motion Capacity |
-Standard ：10nm ， -Optional： 1nm |
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Nominal Stage Mass |
5 kg |
6 kg |
7 kg |
13 kg |
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Moving Mass |
2 kg |
4.5 kg |
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Operating Pressure |
0.5 MPa ± 0.05 MPa |
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Air Consumption |
0.8 SCFM |
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Material |
Aluminum |
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MTBF |
20,000 hrs |
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