ABXY的優(yōu)點(diǎn)：
1、X、 Y采用氣浮軸承，運(yùn)行平穩(wěn)
2、雙驅(qū)步進(jìn)軸具有被動(dòng)減震模塊
3、T軸：任意微轉(zhuǎn)動(dòng)，用于調(diào)平
4、Z軸：快速、準(zhǔn)確的對(duì)焦運(yùn)動(dòng)
|
Travel |
Scan Axis |
350 mm,500 mm, |
|
Step Axis |
350 mm,500 mm |
|
|
Z Axis |
5 mm |
|
|
Tip/Tilt Axis |
±2 mrad |
|
|
Rz |
± 3° |
|
|
Drive System |
Linear Brushless Motor |
|
|
Resolution |
< 1 nm |
|
|
Accuracy |
±200 nm |
|
|
Repeatability（choose linear driver） |
±100 nm ( ±50 nm Optional ) |
|
|
XYZ Position Stability（Air On） |
20 nm |
|
|
Granite Bass Thickness |
250 mm |
|
|
Rated Payload(Maintaining Dynamic Specifications) |
5 kg |
|
|
Maximum Payload |
10 kg |
|
|
Maximum Velocity with Rated Payload |
Scan & Step Axis |
400 mm/s |
|
Peak Acceleration with Rated Payload |
Scan & Step Axis |
1G (10 m/s2) |
|
RMS Acceleration with Rated Load |
Scan & Step Axis |
0.5G (5 m/s2) |
|
Stiffness,First Natural Frequency with Rated Payload |
>100 Hz |
|
|
Pitch |
2 arc sec |
|
|
Roll |
2 arc sec |
|
|
Yaw |
2 arc sec |
|
|
XY straightness |
1 um |
|
|
XY Flatness |
1.2 um |
|
|
XY Orthogonality |
<2 arc sec |
|
|
Velocity ripple( sampled at 400mm/s) |
0.1 % |
|
|
MTBF |
20,000 hours |
|