高動態(tài)特性
|
Basic Model |
VALI025 |
VALI050 |
VALI100 |
VALI150 |
|
|
Total Travel |
25 mm |
50 mm |
100 mm |
150 mm |
|
|
Motor Type |
Brushless Linear Sevomotor |
||||
|
Feedback |
Noncontact Linear Encoder |
0.5 nm - 10 nm |
|||
|
Maximum Speed |
300 mm/s |
||||
|
Maximum Acceleration（no-load） |
10 m/s2 |
||||
|
Maximum Load |
15 kg |
||||
|
Accuracy(with error compensation, temperature stabilized within 0.2°C） |
±0.2 μm |
±0.2 μm |
±0.3 μm |
±0.5 μm |
|
|
Repeatability |
±50 nm |
||||
|
Straightness &Flatness |
±0.25 μm |
±0.4 μm |
|||
|
Pitch/Yaw |
±0.25 arc sec |
±0.5 arc sec |
±1.0 arc sec |
±1.25 arc sec |
|
|
Minimum incremental motion Capacity |
-Standard ：10nm ， -Optional： 1nm |
||||
|
Nominal Stage Mass |
5 kg |
6 kg |
7 kg |
13 kg |
|
|
Moving Mass |
2 kg |
4.5 kg |
|||
|
Operating Pressure |
0.5 MPa ± 0.05 MPa |
||||
|
Air Consumption |
0.8 SCFM |
||||
|
Material |
Aluminum |
||||
|
MTBF |
20,000 hrs |
||||
