VML165
無(wú)鐵芯直線電機(jī)直驅(qū)
高質(zhì)量長(zhǎng)壽命機(jī)械導(dǎo)軌
側(cè)面密封
低成本高性能
多規(guī)格多行程選擇
應(yīng)用：工業(yè)或科研，如計(jì)量、平板顯示器制造等。
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Mechanical Specifications |
165-100 |
165-150 |
165-200 |
165-250 |
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Travel |
100 mm |
150 mm |
200 mm |
250 mm |
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Calibrated Accuracy |
±1 μm |
±1 μm |
±1.5 μm |
±1.5 μm |
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Resolution |
1 nm – 10 nm |
1 nm – 10 nm |
1 nm – 10 nm |
1 nm – 10 nm |
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Repeatability (Bi-Directional) |
±0.5 μm |
±0.5 μm |
±0.5 μm |
±0.5 μm |
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Straightness & Flatness |
±2.5 μm |
±3 μm |
±4.5 μm |
±5 μm |
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Pitchc & Yaw |
6 arc sec |
7 arc sec |
9 arc sec |
10 arc sec |
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Maximum Speed |
2 m/s |
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Maximum Acceleration |
30 m/s2 |
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Maximum Force (Continuous) |
70 N |
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Load Capacity |
Horizontal |
45 kg |
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Side |
45 kg |
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Moving Mass |
2.5 kg |
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Stage Mass |
10 kg |
11 kg |
12 kg |
13 kg |
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Material |
Aluminum |
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MTBF |
20,000 hrs |
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|
Mechanical Specifications |
165-300 |
165-400 |
165-500 |
165-600 |
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Travel |
300 mm |
400 mm |
500 mm |
600 mm |
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|
Calibrated Accuracy |
±1.5 μm |
±1.5 μm |
±2 μm |
±2 μm |
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|
Resolution |
1 nm – 10 nm |
1 nm – 10 nm |
1 nm – 10 nm |
1 nm – 10 nm |
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|
Repeatability (Bi-Directional) |
±0.5 μm |
±0.5 μm |
±0.5 μm |
±0.5 μm |
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|
Straightness & Flatness |
±6 μm |
±8 μm |
±9 μm |
±10 μm |
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|
Pitch & Yaw |
12 arc sec |
15 arc sec |
17arc sec |
19 arc sec |
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|
Maximum Speed |
2 m/s |
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|
Maximum Acceleration |
30 m/s2 |
|||||
|
Maximum Force (Continuous) |
70 N |
|||||
|
Load Capacity |
Horizontal |
45 kg |
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|
Side |
45 kg |
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|
Moving Mass |
2.5 kg |
|||||
|
Stage Mass |
14 kg |
16 kg |
18 kg |
20 kg |
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Material |
Aluminum |
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MTBF(Mean Time Between Failure) |
20,000 hrs |
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